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Fab Equipment
March 22, 2017
How Applied Materials and fab partners are harnessing machine learning
The equipment giant's Computational Process Control strategy takes a pragmatic approach to Industry 4.0 and is likely to influence EDA tools for incoming nodes.
Article | Topics:
EDA - DFM
| Tags:
10nm
,
5nm
,
etch
,
fab
,
lithography
,
machine learning
,
process control
,
PVD
| Organizations:
Applied Materials
,
GlobalFoundries
,
Samsung Semiconductor
,
TSMC
March 26, 2015
A review of model development for 10nm lithography
John Sturtevant looks at ongoing preparations for the incoming node and charts significant progress that has already been made.
Article | Topics:
EDA - DFM
| Tags:
10nm
,
lithography
,
models
| Organizations:
Applied Materials
,
Hitachi
,
Mentor Graphics
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ESL
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